Anchor Losses in AlN Contour Mode Resonators

Journal of Microelectromechanical Systems 2015 / 4 Vol. 24; Iss. 2

Anchor Losses in AlN Contour Mode Resonators

Segovia-Fernandez, Jeronimo, Cremonesi, Massimiliano, Cassella, Cristian, Frangi, Attilio, Piazza, Gianluca
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2367418
Date:
April, 2015
File:
PDF, 2.56 MB
english, 2015
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