Fabrication of Self-Packaged Seamless Nanoporous SU-8...

Journal of Microelectromechanical Systems 2015 / 4 Vol. 24; Iss. 2

Fabrication of Self-Packaged Seamless Nanoporous SU-8 Microchannels

Fang, Sheng-Po, Jao, Pit Fee, Cho, Kun, Yoon, Jung Hae, Kim, Kyoung-Tae, Yoon, Yong-Kyu
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2396472
Date:
April, 2015
File:
PDF, 784 KB
english, 2015
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