STI Crater Defect Reduction for Semiconductor Device Yield...

IEEE Transactions on Semiconductor Manufacturing 2013 / 08 Vol. 26; Iss. 3

STI Crater Defect Reduction for Semiconductor Device Yield Improvement

Liang, Li, Song, Rao Xue, Wei, Lu, Alex, See
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Volume:
26
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2013.2267545
Date:
August, 2013
File:
PDF, 579 KB
english, 2013
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