Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 03 Vol. 32; Iss. 2
Helium ion microscopy
Hlawacek, Gregor, Veligura, Vasilisa, van Gastel, Raoul, Poelsema, BeneVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4863676
Date:
March, 2014
File:
PDF, 3.66 MB
english, 2014