SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona,...

  • Main
  • SPIE Proceedings [SPIE SPIE...

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

Sánchez-Rojas, José Luis, Brama, Riccardo, Wasisto, Hutomo Suryo, Yu, Feng, Doering, Lutz, Völlmeke, Stefan, Brand, Uwe, Bakin, Andrey, Waag, Andreas, Peiner, Erwin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2179866
File:
PDF, 1006 KB
english, 2015
Conversion to is in progress
Conversion to is failed