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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices
Sánchez-Rojas, José Luis, Brama, Riccardo, Wasisto, Hutomo Suryo, Yu, Feng, Doering, Lutz, Völlmeke, Stefan, Brand, Uwe, Bakin, Andrey, Waag, Andreas, Peiner, ErwinVolume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2179866
File:
PDF, 1006 KB
english, 2015