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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Reliability, Testing, and Characterization of MEMS/MOEMS III - MEMS characterization using new hybrid laser Doppler vibrometer/strobe video system
Lawrence, Eric M., Rembe, Christian, Tanner, Danelle M., Ramesham, RajeshuniVolume:
5343
Year:
2003
Language:
english
DOI:
10.1117/12.524565
File:
PDF, 287 KB
english, 2003