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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Some factors that affect the surface measurement accuracy of a low-coherence interference microscope
Lovicar, Luděk, Chmelík, Radim, Komrska, Jiří, Matoušková, Veronika, Kolman, Pavel, Foret, Zdeněk, Miler, Miroslav, Senderáková, Dagmar, Hrabovský, MiroslavYear:
2012
Language:
english
DOI:
10.1117/12.739688
File:
PDF, 1.05 MB
english, 2012