![](/img/cover-not-exists.png)
Oxidation of Aqueous HF-treated Si(001) Surface Induced by Translational Kinetic Energy of O 2 at Room Temperature
Yoshigoe, Akitaka, Teraoka, YudenVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.5749
Date:
September, 2003
File:
PDF, 192 KB
english, 2003