Effect of Slurry Ionic Salts at Dielectric Silica CMP
Choi, Wonseop, Mahajan, Uday, Lee, Seung-Mahn, Abiade, Jeremiah, Singh, Rajiv K.Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1644609
File:
PDF, 308 KB
english, 2004