Effects of Ammonia Addition on Thermal Chemical Vapor...

Journal of The Electrochemical Society 2011 Vol. 158; Iss. 7

Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

Lin, Chia-Ya, Lai, Liang-Hsun, Liu, Yu-Xian, Shiue, Sham-Tsong, Lin, Hung-Yi
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3591106
File:
PDF, 1.71 MB
english, 2011
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