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Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate
Limcharoen, Alonggot, Limsuwan, Pichet, Pakpum, Chupong, Siangchaew, KrisdaVolume:
2013
Year:
2013
Language:
english
Journal:
Journal of Nanomaterials
DOI:
10.1155/2013/851489
File:
PDF, 1.98 MB
english, 2013