Classification and Size Estimation of Wafer Defects by...

Electronics and Communications in Japan 2015 / 06 Vol. 98; Iss. 6

Classification and Size Estimation of Wafer Defects by Using Scattered Light Distribution

SUGIHARA, YOSHIHIKO, HONDA, TOSHIFUMI, URANO, YUTA, WATANABE, MASAHIRO, NOGUCHI, SO, IGARASHI, HAJIME
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Volume:
98
Language:
english
Journal:
Electronics and Communications in Japan
DOI:
10.1002/ecj.11706
Date:
June, 2015
File:
PDF, 949 KB
english, 2015
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