Non-destructive Raman evaluation of a heavily doped surface...

Materials Science in Semiconductor Processing 2015 / 11 Vol. 39

Non-destructive Raman evaluation of a heavily doped surface layer fabricated by laser doping with B-doped Si nanoparticles

Momose, Miho, Furukawa, Yukio
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Volume:
39
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.06.022
Date:
November, 2015
File:
PDF, 1.02 MB
english, 2015
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