Scanning electron microscope for in situ study of crystallization of Ge[sub 2]Sb[sub 2]Te[sub 5] in phase-change memory
Yin, You, Niida, Daisuke, Ota, Kazuhiro, Sone, Hayato, Hosaka, SumioVolume:
78
Year:
2007
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2818804
File:
PDF, 508 KB
english, 2007