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Surface roughness development on ArF-photoresist studied by beam-irradiation of CF 4 plasma
Takeuchi, Takuya, Ishikawa, Kenji, Setsuhara, Yuichi, Takeda, Keigo, Kondo, Hiroki, Sekine, Makoto, Hori, MasaruVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/10/102001
Date:
March, 2013
File:
PDF, 432 KB
english, 2013