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Stress relaxation in dual ion beam sputtered Nb 2 O 5 and SiO 2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities
Ullah, Anayat, Wilke, Hans, Memon, Imran, Shen, Yannan, Nguyen, Duc Toan, Woidt, Carsten, Hillmer, HartmutVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/5/055019
Date:
May, 2015
File:
PDF, 1.05 MB
english, 2015