Nanopore patterning using Al 2...

Journal of Micromechanics and Microengineering 2015 / 07 Vol. 25; Iss. 7

Nanopore patterning using Al 2 O 3 hard masks on SOI substrates

Wang, Xiaofeng, Goryll, Michael
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/7/075020
Date:
July, 2015
File:
PDF, 1.02 MB
english, 2015
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