SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Lasers as Tools for Manufacturing of Durable Goods and Microelectronics - 193-nm lithography (Review Paper)
Rothschild, Mordechai, Forte, Anthony R., Horn, Mark W., Kunz, Roderick R., Palmateer, Susan C., Sedlacek, Jan H. C., Dubowski, Jan J., Mazumder, Jyotirmoy, Migliore, Leonard R., Roychoudhuri, ChandraVolume:
2703
Year:
1996
Language:
english
DOI:
10.1117/12.237751
File:
PDF, 396 KB
english, 1996