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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Infrared laser deposition of Teflon coatings on microstructures
Papantonakis, M. R., HaglundJr., R. F., Tanner, Danelle M., Ramesham, RajeshuniVolume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.647680
File:
PDF, 1.22 MB
english, 2006