Phosphine Doping Effects in the Plasma Deposition of...

Phosphine Doping Effects in the Plasma Deposition of Polycrystalline Silicon Films

Kakinuma, Hiroaki, Mohri, Mikio, Tsuruoka, Taiji
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L1392
Date:
October, 1992
File:
PDF, 915 KB
1992
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