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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Low Temperature Plasma-Assisted-Wafer-Bonding for MEMS
Sanz-Velasco, Anke, Bring, Martin, Rödjegård, Henrik, Andersson, Gert I., Enoksson, PeterVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357086
File:
PDF, 468 KB
english, 2006