Pad porosity, compressibility and slurry delivery effects...

Thin Solid Films 2000 Vol. 366; Iss. 1-2

Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments

Dipto G Thakurta, Christopher L Borst, Donald W Schwendeman, Ronald J Gutmann, William N Gill
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Volume:
366
Year:
2000
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(00)00748-3
File:
PDF, 671 KB
english, 2000
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