Thermodynamics analyses of the effect of CH3 and C2H2 on...

Thermodynamics analyses of the effect of CH3 and C2H2 on morphology of CVD diamond films

Jian-Yun Zhang, Peng-Fei Wang, Shi-Jin Ding, David Wei Zhang, Ji-Tao Wang, Zhi-Jie Liu
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Volume:
368
Year:
2000
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(00)00779-3
File:
PDF, 104 KB
english, 2000
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