Aerosol and plasma assisted chemical vapor deposition...

Aerosol and plasma assisted chemical vapor deposition process for multi-component oxide La0.8Sr0.2MnO3 thin film

H.B. Wang, G.Y. Meng, D.K. Peng
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Volume:
368
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)00781-1
File:
PDF, 224 KB
english, 2000
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