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Effect of Al pre-deposition layer on the epitaxial growth of silicon on Al2O3/Si (111) substrates
Makoto Ishida, Young-Chul Jung, Hiroyuki Miura, Yoshiaki Koji, Kazuaki Sawada, Mamoru Yoshimoto, Mizuno Keisuke, Miyahara Takahumi, Maruta HideakiVolume:
369
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)00792-6
File:
PDF, 385 KB
english, 2000