Relaxed SiGe buffers with thicknesses below 0.1 μm

Thin Solid Films 2000 Vol. 369; Iss. 1-2

Relaxed SiGe buffers with thicknesses below 0.1 μm

M. Bauer, K. Lyutovich, M. Oehme, E. Kasper, H.-J. Herzog, F. Ernst
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Volume:
369
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)00796-3
File:
PDF, 597 KB
english, 2000
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