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Control of self-assembling formation of nanometer silicon dots by low pressure chemical vapor deposition
S Miyazaki, Y Hamamoto, E Yoshida, M Ikeda, M HiroseVolume:
369
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)00834-8
File:
PDF, 383 KB
english, 2000