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Surface structures of silicon nitride thin films on Si(111)
Guangjie Zhai, Jianshu Yang, Nelson Cue, Xue-sen WangVolume:
366
Year:
2000
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(00)00852-x
File:
PDF, 709 KB
english, 2000