Low temperature doping of poly-SiGe films with boron by co-sputtering
Emil V Jelenković, K.Y Tong, W.Y Cheung, I.H Wilson, S.P Wong, M.C PoonVolume:
368
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(00)00922-6
File:
PDF, 259 KB
english, 2000