![](/img/cover-not-exists.png)
High temperature cracking of tungsten polycide films on quartz substrate
Jaegab Lee, Sang-Hun Oh, Jongmu Lee, Eungu Lee, Ingon Lim, Won-Kyu Park, Geunho KimVolume:
370
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)00936-6
File:
PDF, 349 KB
english, 2000