Microstructure of thermal hillocks on blanket Al thin films

Thin Solid Films 2000 Vol. 371; Iss. 1-2

Microstructure of thermal hillocks on blanket Al thin films

Deok-kee Kim, Birgit Heiland, William D Nix, Eduard Arzt, Michael D Deal, James D Plummer
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Volume:
371
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)00971-8
File:
PDF, 1.63 MB
english, 2000
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