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Spectroscopic ellipsometry of SixGe1−x/Si: a tool for composition and profile analysis in strained heterostructures used in the microelectronics industry
F Ferrieu, P Ribot, J.L RegoliniVolume:
373
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)01137-8
File:
PDF, 375 KB
english, 2000