Stability of unhydrogenated polysilicon thin film...

Thin Solid Films 2001 Vol. 383; Iss. 1-2

Stability of unhydrogenated polysilicon thin film transistors and structural quality of the channel material

H. Toutah, B. Tala-Ighil, J.F. Llibre, A. Rahal, K. Mourgues, Y. Helen, T. Mohammed-Brahim, R. Dassow, J.R. Köhler
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Volume:
383
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)01573-x
File:
PDF, 313 KB
english, 2001
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