Hydrogenation in laser annealed polysilicon thin-film transistors (TFTs)
F.V. Farmakis, D.M. Tsamados, J. Brini, G. Kamarinos, C.A. Dimitriadis, M. MiyasakaVolume:
383
Year:
2001
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(00)01588-1
File:
PDF, 98 KB
english, 2001