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Rapid deposition of hydrogenated microcrystalline silicon by a high current DC discharge
D. Franz, F. Grangeon, T. Delachaux, A.A. Howling, Ch. Hollenstein, J. KarnerVolume:
383
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)01600-x
File:
PDF, 505 KB
english, 2001