Multilayer structures induced by plasma and laser beam treatments on a-Si:H and a-SiC:H thin films
B. Mitu, G. Dinescu, M. Dinescu, A. Ferrari, M. Balucani, G. Lamedica, A.P. Dementjev, K.I. MaslakovVolume:
383
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)01612-6
File:
PDF, 133 KB
english, 2001