Thin silicon films ranging from amorphous to nanocrystalline obtained by hot-wire CVD
D. Soler, M. Fonrodona, C. Voz, J. Bertomeu, J. AndreuVolume:
383
Year:
2001
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(00)01615-1
File:
PDF, 86 KB
english, 2001