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Thin silicon films ranging from amorphous to...

Thin silicon films ranging from amorphous to nanocrystalline obtained by hot-wire CVD

D. Soler, M. Fonrodona, C. Voz, J. Bertomeu, J. Andreu
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Volume:
383
Year:
2001
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(00)01615-1
File:
PDF, 86 KB
english, 2001
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