Two Dimensional Array of Piezoresistive Nanomechanical...

Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

Yoshikawa, Genki, Akiyama, Terunobu, Loizeau, Frederic, Shiba, Kota, Gautsch, Sebastian, Nakayama, Tomonobu, Vettiger, Peter, Rooij, Nico, Aono, Masakazu
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Volume:
12
Language:
english
Journal:
Sensors
DOI:
10.3390/s121115873
Date:
November, 2012
File:
PDF, 1.16 MB
english, 2012
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