Ion beam synthesized silicides: growth, characterization...

Thin Solid Films 2001 Vol. 381; Iss. 2

Ion beam synthesized silicides: growth, characterization and devices

K.P Homewood, K.J Reeson, R.M Gwilliam, A.K Kewell, M.A Lourenço, G Shao, Y.L Chen, J.S Sharpe, C.N McKinty, T Butler
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Volume:
381
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(00)01742-9
File:
PDF, 239 KB
english, 2001
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