Improvement of Thickness Uniformity of Bulk Silicon Wafer...

Improvement of Thickness Uniformity of Bulk Silicon Wafer by Numerically Controlled Local Wet Etching

Yamamura, Kazuya, Mitani, Takuro, Ueda, Kazuaki, Nagano, Mikinori, Zettsu, Nobuyuki
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Volume:
407-408
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.407-408.372
Date:
February, 2009
File:
PDF, 557 KB
english, 2009
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