High temperature annealing of hydrogenated amorphous...

Thin Solid Films 2001 Vol. 384; Iss. 2

High temperature annealing of hydrogenated amorphous silicon carbide thin films

Yihua Wang, Jianyi Lin, Cheng Hon Alfred Huan, Zhe Chuan Feng, Soo Jin Chua
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Volume:
384
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)01867-8
File:
PDF, 259 KB
english, 2001
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