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Optical properties of amorphous and polycrystalline tantalum oxide thin films measured by spectroscopic ellipsometry from 0.03 to 8.5 eV
E. Franke, M. Schubert, C.L. Trimble, M.J. DeVries, J.A. WoollamVolume:
388
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(00)01881-2
File:
PDF, 197 KB
english, 2001