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Effects of plasma treatment on the electrical and optical properties of indium tin oxide films fabricated by r.f. reactive sputtering
Ching-Ting Lee, Qing-Xuan Yu, Bang-Tai Tang, Hsin-Ying LeeVolume:
386
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)00777-5
File:
PDF, 129 KB
english, 2001