Thin SiGe buffer layer growth by in situ low energy...

Thin Solid Films 2001 Vol. 389; Iss. 1-2

Thin SiGe buffer layer growth by in situ low energy hydrogen plasma preparation

J Kuchenbecker, H Kibbel, P Muthsam, U König
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Volume:
389
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(01)00869-0
File:
PDF, 746 KB
english, 2001
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