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The effect of post-annealing on the electrical properties of (Pb,Sr)TiO3 thin films prepared by liquid source misted chemical deposition for ultra large-scale integration (ULSI) dynamic random access memory (DRAM) capacitor
Hyun Jin Chung, Suk Jin Chung, Jin Hong Kim, Seong Ihl WooVolume:
394
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01015-x
File:
PDF, 247 KB
english, 2001