Strategies for high rate reactive sputtering

Thin Solid Films 2001 Vol. 392; Iss. 2

Strategies for high rate reactive sputtering

Steven J Nadel, Phillip Greene
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Volume:
392
Year:
2001
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(01)01024-0
File:
PDF, 483 KB
english, 2001
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