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Modeling and simulation of AFM cantilever with two piezoelectric layers submerged in liquid over rough surfaces
Korayem, Moharam Habibnejad, Nahavandi, AmirVolume:
42
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2015.05.008
Date:
October, 2015
File:
PDF, 9.33 MB
english, 2015