![](/img/cover-not-exists.png)
Crack formation in TiN films deposited on Pa-n due to large thermal mismatch
Kaustubh S Gadre, T.L AlfordVolume:
394
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01135-x
File:
PDF, 225 KB
english, 2001