Study of GaAs and GaInP etching in Cl2/Ar electron...

Study of GaAs and GaInP etching in Cl2/Ar electron cyclotron resonance plasma

S.F. Yoon, T.K. Ng, H.Q. Zheng
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
394
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01139-7
File:
PDF, 582 KB
english, 2001
Conversion to is in progress
Conversion to is failed