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Preparation and characterization of smooth and dense silicon nitride thin films
Wentao Xu, Toshiyuki Fujimoto, Isao KojimaVolume:
394
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01171-3
File:
PDF, 430 KB
english, 2001